Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8034176 | Gas distribution system for a post-etch treatment system | Yuji Tsukamoto, H. Steven Tomozawa, Thomas Hamelin | 2011-10-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8034176 | Gas distribution system for a post-etch treatment system | Yuji Tsukamoto, H. Steven Tomozawa, Thomas Hamelin | 2011-10-11 |