Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7968466 | Fabrication process of a semiconductor device to form ultrafine patterns smaller than resolution limit of exposure apparatus | Hideharu Shido, Takeo Nagata, Teruo Kurahashi, Yasuyoshi Mishima | 2011-06-28 |