Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7968466 | Fabrication process of a semiconductor device to form ultrafine patterns smaller than resolution limit of exposure apparatus | Kenji Ishikawa, Hideharu Shido, Takeo Nagata, Teruo Kurahashi | 2011-06-28 |
| 7947547 | Method for manufacturing a semiconductor device | Teruo Kurahashi, Manabu Sakamoto | 2011-05-24 |
| 7943500 | Semiconductor device and method of manufacturing the same | Masaomi Yamaguchi | 2011-05-17 |
| 7910415 | Semiconductor device and method of manufacturing the same, and semiconductor substrate and method of manufacturing the same | — | 2011-03-22 |