Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7968466 | Fabrication process of a semiconductor device to form ultrafine patterns smaller than resolution limit of exposure apparatus | Kenji Ishikawa, Hideharu Shido, Takeo Nagata, Yasuyoshi Mishima | 2011-06-28 |
| 7947547 | Method for manufacturing a semiconductor device | Manabu Sakamoto, Yasuyoshi Mishima | 2011-05-24 |