Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7956517 | MEMS structure having a stress inverter temperature-compensated resonator member | Mehrnaz Motiee, Emmanuel P. Quevy, David H. Bernstein | 2011-06-07 |
| 7923790 | Planar microshells for vacuum encapsulated devices and damascene method of manufacture | Emmanuel P. Quevy, Pezhman Monadgemi | 2011-04-12 |