Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7956517 | MEMS structure having a stress inverter temperature-compensated resonator member | Mehrnaz Motiee, Roger T. Howe, Emmanuel P. Quevy | 2011-06-07 |
| 7944124 | MEMS structure having a stress-inducer temperature-compensated resonator member | — | 2011-05-17 |