Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7977136 | Microelectromechanical systems structures and self-aligned high aspect-ratio combined poly and single-crystal silicon fabrication processes for producing same | Farrokh Ayazi, Mina Raieszadeh | 2011-07-12 |
| 7923790 | Planar microshells for vacuum encapsulated devices and damascene method of manufacture | Emmanuel P. Quevy, Roger T. Howe | 2011-04-12 |