Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7977136 | Microelectromechanical systems structures and self-aligned high aspect-ratio combined poly and single-crystal silicon fabrication processes for producing same | Farrokh Ayazi, Pezhman Monadgemi | 2011-07-12 |
| 7933112 | Micro-electromechanical voltage tunable capacitor and and filter devices | Farrokh Ayazi | 2011-04-26 |