Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048788 | Method for treating non-planar structures using gas cluster ion beam processing | John Hautala | 2011-11-01 |
| 7981483 | Method to improve electrical leakage performance and to minimize electromigration in semiconductor devices | Steven R. Sherman, John Hautala | 2011-07-19 |
| 7871929 | Method of forming semiconductor devices containing metal cap layers | Frank M. Cerio, Jr., Gregory Herdt | 2011-01-18 |