Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048788 | Method for treating non-planar structures using gas cluster ion beam processing | Noel Russell | 2011-11-01 |
| 7981483 | Method to improve electrical leakage performance and to minimize electromigration in semiconductor devices | Noel Russell, Steven R. Sherman | 2011-07-19 |
| 7982196 | Method for modifying a material layer using gas cluster ion beam processing | Nathan E. Baxter | 2011-07-19 |
| 7968422 | Method for forming trench isolation using a gas cluster ion beam growth process | — | 2011-06-28 |
| 7947582 | Material infusion in a trap layer structure using gas cluster ion beam processing | Mitchell Carlson | 2011-05-24 |
| 7905199 | Method and system for directional growth using a gas cluster ion beam | Martin D. Tabat | 2011-03-15 |
| 7883999 | Method for increasing the penetration depth of material infusion in a substrate using a gas cluster ion beam | Yan Shao, Thomas G. Tetreault | 2011-02-08 |