Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7927981 | Apparatus for depositing silicon-based thin film and method for depositing silicon-based thin film | Minoru Imaeda, Yuichiro Imanishi | 2011-04-19 |
| 7927982 | Apparatus for mass-producing silicon-based thin film and method for mass-producing silicon-based thin film | Minoru Imaeda, Yuichiro Imanishi | 2011-04-19 |
| 7923377 | Method for forming amorphous carbon film | Tatsuya Terazawa | 2011-04-12 |
| 7914692 | Methods of generating plasma, of etching an organic material film, of generating minus ions, of oxidation and nitriding | Yoshimasa Kondo, Tatsuya Terazawa | 2011-03-29 |
| 7893296 | Method for producing an optically active β-amino acid | Kazuhiko Matsumura, Xiaoyong Zhang | 2011-02-22 |
| 7883750 | Thin films and a method for producing the same | Yukinori Nakamura, Yoshimasa Kondo, Naoto Ohtake | 2011-02-08 |