Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7927981 | Apparatus for depositing silicon-based thin film and method for depositing silicon-based thin film | Minoru Imaeda, Takao Saito | 2011-04-19 |
| 7927982 | Apparatus for mass-producing silicon-based thin film and method for mass-producing silicon-based thin film | Minoru Imaeda, Takao Saito | 2011-04-19 |