Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7923377 | Method for forming amorphous carbon film | Takao Saito | 2011-04-12 |
| 7914692 | Methods of generating plasma, of etching an organic material film, of generating minus ions, of oxidation and nitriding | Takao Saito, Yoshimasa Kondo | 2011-03-29 |