Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7957118 | Multi-zone electrostatic chuck and chucking method | Tung Long Lai, Soon-Kang Huang | 2011-06-07 |
YC
YI-PIN CHANG
Overall (2011): #125,171 of 364,097Top 35%
1
Patents 2011