Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7957118 | Multi-zone electrostatic chuck and chucking method | YI-PIN CHANG, Tung Long Lai | 2011-06-07 |
| 7950983 | Retainer ring | Chih-Lung Lin, Chyi Shyuan Chern | 2011-05-31 |
SH
Soon-Kang Huang
Overall (2011): #66,553 of 364,097Top 20%
2
Patents 2011