Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7957118 | Multi-zone electrostatic chuck and chucking method | YI-PIN CHANG, Soon-Kang Huang | 2011-06-07 |
TL
Tung Long Lai
Overall (2011): #138,835 of 364,097Top 40%
1
Patents 2011