Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7968506 | Wet cleaning stripping of etch residue after trench and via opening formation in dual damascene process | Chun-Li Chou, Syun-Ming Jang, Chih-Yuan Ting | 2011-06-28 |
| 7875547 | Contact hole structures and contact structures and fabrication methods thereof | Ju-Wang Hsu, Yi-Nien Su, Peng-Fu Hsu, Hun-Jan Tao | 2011-01-25 |