Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7968506 | Wet cleaning stripping of etch residue after trench and via opening formation in dual damascene process | Syun-Ming Jang, Jyu-Horng Shieh, Chih-Yuan Ting | 2011-06-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7968506 | Wet cleaning stripping of etch residue after trench and via opening formation in dual damascene process | Syun-Ming Jang, Jyu-Horng Shieh, Chih-Yuan Ting | 2011-06-28 |