Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7906252 | Multiple resist layer phase shift mask (PSM) blank and PSM formation method | Hsin-Chang Lee, Chia-Jen Chen, Lee-Chih Yeh | 2011-03-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7906252 | Multiple resist layer phase shift mask (PSM) blank and PSM formation method | Hsin-Chang Lee, Chia-Jen Chen, Lee-Chih Yeh | 2011-03-15 |