Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8068208 | System and method for improving immersion scanner overlay performance | Jui-Chung Peng, Tzung-Chi Fu, Chin-Hsiang Lin, Chien-Hsun Lin, Chun-Hung Lin +2 more | 2011-11-29 |
| 7901854 | Wafer edge exposure unit | Po-Chang Huang, Heng-Jen Lee | 2011-03-08 |