Issued Patents 2011
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8030681 | Group III nitride substrate, semiconductor device comprising the same, and method for producing surface-treated group III nitride substrate | — | 2011-10-04 |
| 7981216 | Vacuum processing apparatus | Masahiko Tanaka, Akira Kumagai, Manabu Ikemoto, Katsuhisa Yuda | 2011-07-19 |
| 7973322 | Nitride semiconductor light emitting device and method for forming the same | Katsushi Akita, Takashi Kyono, Hitoshi Kasai | 2011-07-05 |
| 7919343 | Group III nitride crystal and method for surface treatment thereof, group III nitride stack and manufacturing method thereof, and group III nitride semiconductor device and manufacturing method thereof | Naoki Matsumoto, Masato Irikura | 2011-04-05 |
| 7901960 | Group III nitride substrate, epitaxial layer-provided substrate, methods of manufacturing the same, and method of manufacturing semiconductor device | Akihiro Hachigo, Masato Irikura, Seiji Nakahata | 2011-03-08 |
| 7883775 | Diamond film coated tool and process for producing the same | Katsuo Kazahaya, Shigetaka Kawai, Yasushi Matsumoto, Takahiro Imai | 2011-02-08 |
| 7872331 | Nitride semiconductor wafer | Hidenori Mikami, Naoki Matsumoto | 2011-01-18 |
| 7863609 | Compound semiconductor substrate, semiconductor device, and processes for producing them | Fumitake Nakanishi | 2011-01-04 |