Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8066896 | Apparatus for etching wafer by single-wafer process and single wafer type method for etching wafer | Tomohiro Hashii, Katsuhiko Murayama, Kazushige Takaishi, Takeo Katoh | 2011-11-29 |
| 7955982 | Method for smoothing wafer surface and apparatus used therefor | Takeo Katoh, Tomohiro Hashii, Katsuhiko Murayama, Kazushige Takaishi | 2011-06-07 |
| 7906438 | Single wafer etching method | Tomohiro Hashii, Katsuhiko Murayama, Kazushige Takaishi, Takeo Katoh | 2011-03-15 |