Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8080106 | Epitaxial silicon wafer and production method thereof | Takayuki Kihara, Yasuyuki Hashimoto | 2011-12-20 |
| 8066896 | Apparatus for etching wafer by single-wafer process and single wafer type method for etching wafer | Sakae Koyata, Tomohiro Hashii, Katsuhiko Murayama, Takeo Katoh | 2011-11-29 |
| 7998867 | Method for manufacturing epitaxial wafer | Tomonori Miura | 2011-08-16 |
| 7955440 | Method for cleaning silicon wafer and apparatus for cleaning the silicon wafer | Shigeru Okuuchi | 2011-06-07 |
| 7955982 | Method for smoothing wafer surface and apparatus used therefor | Takeo Katoh, Tomohiro Hashii, Katsuhiko Murayama, Sakae Koyata | 2011-06-07 |
| 7906438 | Single wafer etching method | Sakae Koyata, Tomohiro Hashii, Katsuhiko Murayama, Takeo Katoh | 2011-03-15 |