Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8066896 | Apparatus for etching wafer by single-wafer process and single wafer type method for etching wafer | Sakae Koyata, Tomohiro Hashii, Kazushige Takaishi, Takeo Katoh | 2011-11-29 |
| 8025182 | Gas cartridge | Keijiro Murayama, Jyunichi Tamura, Masakazu Konishi | 2011-09-27 |
| 8006880 | Gas combustion type driving tool | Hiroshi Tanaka, Hajime Takemura, Junichi Tamura | 2011-08-30 |
| 7955982 | Method for smoothing wafer surface and apparatus used therefor | Takeo Katoh, Tomohiro Hashii, Sakae Koyata, Kazushige Takaishi | 2011-06-07 |
| 7938303 | Gas combustion-type driving tool | Junichi Tamura, Masakazu Konishi | 2011-05-10 |
| 7906438 | Single wafer etching method | Sakae Koyata, Tomohiro Hashii, Kazushige Takaishi, Takeo Katoh | 2011-03-15 |