Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8037761 | Quantitative evaluation device and method of atomic vacancy existing in silicon wafer | Terutaka Goto, Yuichi Nemoto, Hiroshi Kaneta | 2011-10-18 |
| 7936051 | Silicon wafer and its manufacturing method | Toshiaki Ono | 2011-05-03 |