Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8037761 | Quantitative evaluation device and method of atomic vacancy existing in silicon wafer | Terutaka Goto, Hiroshi Kaneta, Masataka Hourai | 2011-10-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8037761 | Quantitative evaluation device and method of atomic vacancy existing in silicon wafer | Terutaka Goto, Hiroshi Kaneta, Masataka Hourai | 2011-10-18 |