Issued Patents 2011
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071474 | Method of manufacturing semiconductor device suitable for forming wiring using damascene method | Nobuyuki Ohtsuka, Hideki Kitada, Yoshiyuki Nakao | 2011-12-06 |
| 8067309 | Semiconductor device using metal nitride as insulating film and its manufacture method | Yoshiyuki Nakao, Hiroki Kondo, Takashi Suzuki, Nobuyuki Nishikawa | 2011-11-29 |
| 8067836 | Semiconductor device with reduced increase in copper film resistance | Masaki Haneda, Nobuyuki Ohtsuka, Yoshiyuki Nakao, Michie Sunayama, Takahiro Tabira | 2011-11-29 |
| 8003518 | Semiconductor device fabrication method | Masaki Haneda, Michie Sunayama | 2011-08-23 |
| 8003527 | Manufacturing method of semiconductor device | Michie Sunayama | 2011-08-23 |
| 7994055 | Method of manufacturing semiconductor apparatus, and semiconductor apparatus | Hisaya Sakai | 2011-08-09 |
| 7955970 | Semiconductor device manufacturing method | Michie Sunayama, Masaki Haneda | 2011-06-07 |
| 7943517 | Semiconductor device with a barrier film | Junichi Koike, Makoto Wada, Shingo Takahashi, Hideki Shibata, Satoshi Nishikawa +3 more | 2011-05-17 |
| 7935624 | Fabrication method of semiconductor device having a barrier layer containing Mn | Nobuyuki Ohtsuka, Yoshiyuki Nakao, Hisaya Sakai | 2011-05-03 |