Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071474 | Method of manufacturing semiconductor device suitable for forming wiring using damascene method | Noriyoshi Shimizu, Hideki Kitada, Yoshiyuki Nakao | 2011-12-06 |
| 8067836 | Semiconductor device with reduced increase in copper film resistance | Masaki Haneda, Noriyoshi Shimizu, Yoshiyuki Nakao, Michie Sunayama, Takahiro Tabira | 2011-11-29 |
| 7935624 | Fabrication method of semiconductor device having a barrier layer containing Mn | Noriyoshi Shimizu, Yoshiyuki Nakao, Hisaya Sakai | 2011-05-03 |
| 7928476 | Semiconductor device and method of manufacturing the same | Hiroshi Kudo, Masaki Haneda, Tamotsu Owada | 2011-04-19 |