Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8076223 | Method for producing semiconductor substrate | Satoshi Oka | 2011-12-13 |
| 8053334 | Method for forming silicon oxide film of SOI wafer | Isao Yokokawa, Shin Yamaguchi | 2011-11-08 |
| 7985660 | Method for manufacturing soi wafer | Isao Yokokawa, Hiroshi Takeno | 2011-07-26 |
| 7861421 | Method for measuring rotation angle of bonded wafer | Norihiro Kobayashi, Tohru Ishizuka | 2011-01-04 |