Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7902042 | Method of manufacturing SOI wafer and thus-manufactured SOI wafer | Hiroji Aga, Masayuki Imai, Tatsuo Enomoto, Hiroshi Takeno | 2011-03-08 |
| 7890620 | Monitoring system and monitoring method | Mineyoshi Masuda, Tomohiro Morimura | 2011-02-15 |
| 7861421 | Method for measuring rotation angle of bonded wafer | Tohru Ishizuka, Nobuhiko Noto | 2011-01-04 |