Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8053334 | Method for forming silicon oxide film of SOI wafer | Nobuhiko Noto, Shin Yamaguchi | 2011-11-08 |
| 7985660 | Method for manufacturing soi wafer | Hiroshi Takeno, Nobuhiko Noto | 2011-07-26 |
| 7959731 | Method for producing semiconductor wafer | Hiroji Aga, Kiyoshi Mitani | 2011-06-14 |