KK

Kazuhiro Katayama

SC Shin-Etsu Chemical Co.: 1 patents #80 of 218Top 40%
Overall (2011): #251,129 of 364,097Top 70%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8057982 Monomer, resist composition, and patterning process Jun Hatakeyama, Takeshi Kinsho, Masaki Ohashi 2011-11-15