Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8029622 | Substrate processing apparatus, liquid film freezing method and substrate processing method | Katsuhiko Miya, Akira Izumi | 2011-10-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8029622 | Substrate processing apparatus, liquid film freezing method and substrate processing method | Katsuhiko Miya, Akira Izumi | 2011-10-04 |