Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075731 | Substrate processing apparatus and a substrate processing method | — | 2011-12-13 |
| 8029622 | Substrate processing apparatus, liquid film freezing method and substrate processing method | Naozumi Fujiwara, Akira Izumi | 2011-10-04 |
| 8020570 | Substrate processing apparatus and substrate processing method | Takuya Kishimoto | 2011-09-20 |
| 7964042 | Substrate processing apparatus and substrate processing method | Tomonori Kojimaru | 2011-06-21 |
| 7942976 | Substrate processing apparatus and substrate processing method | Akira Izumi | 2011-05-17 |