Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8029622 | Substrate processing apparatus, liquid film freezing method and substrate processing method | Katsuhiko Miya, Naozumi Fujiwara | 2011-10-04 |
| 8030223 | Solar cell and method of fabricating the same | Masatoshi Takahashi, Hiroyuki Ohtsuka, Hideki Matsumura, Atsushi Masuda | 2011-10-04 |
| 7942976 | Substrate processing apparatus and substrate processing method | Katsuhiko Miya | 2011-05-17 |
| 7867337 | Substrate processing method and substrate processing apparatus | — | 2011-01-11 |