Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7989263 | Method for manufacturing a micromechanical chip and a component having a chip of this type | Torsten Kramer, Christina Leinenbach | 2011-08-02 |
| 7918136 | Micromechanical sensor element | Joerg Muchow, Hubert Benzel, Simon Armbruster | 2011-04-05 |
| 7902615 | Micromechanical structure for receiving and/or generating acoustic signals, method for producing a micromechanical structure, and use of a micromechanical structure | Roman Schlosser, Stefan Weiss, Frank Fischer | 2011-03-08 |
| 7863072 | Micromechanical diaphragm sensor having a double diaphragm | Matthias Illing, Heribert Weber, Heiko Stahl, Stefan Weiss | 2011-01-04 |