Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7902615 | Micromechanical structure for receiving and/or generating acoustic signals, method for producing a micromechanical structure, and use of a micromechanical structure | Roman Schlosser, Frank Fischer, Christoph Schelling | 2011-03-08 |
| 7863072 | Micromechanical diaphragm sensor having a double diaphragm | Matthias Illing, Heribert Weber, Christoph Schelling, Heiko Stahl | 2011-01-04 |