Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7918136 | Micromechanical sensor element | Joerg Muchow, Simon Armbruster, Christoph Schelling | 2011-04-05 |
| 7872487 | Semiconductor wafer having a multitude of sensor elements and method for measuring sensor elements on a semiconductor wafer | Holger Ross, Roland Guenschel, Harald Guenschel | 2011-01-18 |