Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8064124 | Silicon-rich silicon nitrides as etch stops in MEMS manufacture | Wonsuk Chung, Steve Zee | 2011-11-22 |
| 7944603 | Microelectromechanical device and method utilizing a porous surface | Lior Kogut | 2011-05-17 |
| 7936031 | MEMS devices having support structures | Jeffrey B. Sampsell, Clarence Chui, Manish Kothari, Mark W. Miles, Wonsuk Chung +1 more | 2011-05-03 |
| 7889417 | Electromechanical system having a dielectric movable membrane | — | 2011-02-15 |
| 7875485 | Methods of fabricating MEMS devices having overlying support structures | Suryaprakash Ganti, Mark W. Miles, Clarence Chui, Manish Kothari, Ming-Hau Tung | 2011-01-25 |