Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8064124 | Silicon-rich silicon nitrides as etch stops in MEMS manufacture | Wonsuk Chung, Teruo Sasagawa | 2011-11-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8064124 | Silicon-rich silicon nitrides as etch stops in MEMS manufacture | Wonsuk Chung, Teruo Sasagawa | 2011-11-22 |