Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7875485 | Methods of fabricating MEMS devices having overlying support structures | Teruo Sasagawa, Mark W. Miles, Clarence Chui, Manish Kothari, Ming-Hau Tung | 2011-01-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7875485 | Methods of fabricating MEMS devices having overlying support structures | Teruo Sasagawa, Mark W. Miles, Clarence Chui, Manish Kothari, Ming-Hau Tung | 2011-01-25 |