Issued Patents 2011
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8070145 | Holding unit, assembly system, sputtering unit, and processing method and processing unit | — | 2011-12-06 |
| 8054472 | Pattern forming apparatus, mark detecting apparatus, exposure apparatus, pattern forming method, exposure method, and device manufacturing method | — | 2011-11-08 |
| 8045136 | Stage drive method and stage unit, exposure apparatus, and device manufacturing method | — | 2011-10-25 |
| 8027021 | Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method | — | 2011-09-27 |
| 8023106 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method | Yuho Kanaya | 2011-09-20 |
| 8023103 | Exposure apparatus, exposure method, and method for producing device | Hideki Komatsuda | 2011-09-20 |
| 8013982 | Movable body drive method and system, pattern formation method and apparatus, exposure method and apparatus for driving movable body based on measurement value of encoder and information on flatness of scale, and device manufacturing method | — | 2011-09-06 |
| 7999918 | Movable body system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing method | — | 2011-08-16 |
| 7927428 | Cleaning member, cleaning method, and device manufacturing method | — | 2011-04-19 |