Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8081296 | Illumination optical apparatus, exposure apparatus, and device manufacturing method | — | 2011-12-20 |
| 8023103 | Exposure apparatus, exposure method, and method for producing device | Yuichi Shibazaki | 2011-09-20 |