Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8085385 | Movable body drive method and movable body drive system, and pattern formation method and pattern formation apparatus | — | 2011-12-27 |
| 8023106 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method | Yuichi Shibazaki | 2011-09-20 |