Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8068209 | Nozzle to help reduce the escape of immersion liquid from an immersion lithography tool | Alex Ka Tim Poon, Leonard Wai Fung Kho, Derek Coon | 2011-11-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8068209 | Nozzle to help reduce the escape of immersion liquid from an immersion lithography tool | Alex Ka Tim Poon, Leonard Wai Fung Kho, Derek Coon | 2011-11-29 |