Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8068209 | Nozzle to help reduce the escape of immersion liquid from an immersion lithography tool | Leonard Wai Fung Kho, Guarav Keswani, Derek Coon | 2011-11-29 |
| 8054448 | Apparatus and method for providing fluid for immersion lithography | Leonard Wai Fung Kho | 2011-11-08 |
| 7929109 | Apparatus and method for recovering liquid droplets in immersion lithography | Leonard Wai Fung Kho, Gaurav Keswani | 2011-04-19 |