Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8068209 | Nozzle to help reduce the escape of immersion liquid from an immersion lithography tool | Alex Ka Tim Poon, Leonard Wai Fung Kho, Guarav Keswani | 2011-11-29 |
| 7903233 | Offset partial ring seal in immersion lithographic system | — | 2011-03-08 |