Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058130 | Method of forming a nitrogen-enriched region within silicon-oxide-containing masses | Gurtej S. Sandhu, John T. Moore | 2011-11-15 |
| 8049514 | Integrated circuit inspection system | Gurtej S. Sandhu | 2011-11-01 |
| 8033884 | Methods of forming plasma-generating structures; methods of plasma-assisted etching, and methods of plasma-assisted deposition | Stephen J. Kramer | 2011-10-11 |
| 8003000 | Plasma processing, deposition and ALD methods | — | 2011-08-23 |
| 8003542 | Multiple spacer steps for pitch multiplication | Sanket Sant, Gurtej S. Sandhu | 2011-08-23 |