Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8003542 | Multiple spacer steps for pitch multiplication | Gurtej S. Sandhu, Neal R. Rueger | 2011-08-23 |
| 7972471 | Inductively coupled dual zone processing chamber with single planar antenna | — | 2011-07-05 |