Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043944 | Process for enhancing solubility and reaction rates in supercritical fluids | Theodore M. Taylor | 2011-10-25 |
| 8033884 | Methods of forming plasma-generating structures; methods of plasma-assisted etching, and methods of plasma-assisted deposition | Neal R. Rueger | 2011-10-11 |
| 7862316 | Foamed mechanical planarization pads made with supercritical fluid | — | 2011-01-04 |